About: http://webisa.webdatacommons.org/220588978

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For forming the gate electrodes, also usable are polycrystalline silicon, metals such as titanium, tungsten, tantalum, etc., and silicides of such metals, as a single layer or as plural layers. (FIG. 4(D))
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca