About: http://webisa.webdatacommons.org/220604790

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For an excimer laser, such as a KrF- or ArF-excimer laser, the characteristic emission spectrum may be as broad as 400 pm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr