About: http://webisa.webdatacommons.org/22073382

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The lightly doped source and drain areas 17 for the N-FETs are formed by ion implantation of an N-type dopant, such as arsenic (As) or phosphorus (P).
http://www.w3.org/ns/prov#wasQuotedFrom	google.es