About: http://webisa.webdatacommons.org/22081984

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The techniques provided are particularly useful, for instance, when lithography registration errors cause neighboring conductive features to be physically closer than expected, but can also he used when such proximity is intentional.
http://www.w3.org/ns/prov#wasQuotedFrom	faqs.org