About: http://webisa.webdatacommons.org/220968098

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	a heat expansion coefficient of said semiconductor wafer, and ??t2 is a rising temperature of said semiconductor wafer at the time of the test. 10.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com