About: http://webisa.webdatacommons.org/221174459

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Each trench 51 extends from the surface of the RESURF layer 18 to the drain layer 10. [0367] As shown in FIG. 37B, an n-type impurity such as phosphorus or arsenic is ion-implanted into the RESURF layer 18 from oblique directions.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com