About: http://webisa.webdatacommons.org/221232133

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Particularly by stopping the operation of the temperature controller II35, it is possible to prevent impurities, such as water contained in air, from adhering to the cooled portions when the processing chamber 10 is opened to air.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr