About: http://webisa.webdatacommons.org/221445705

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Source/drain regions 3 can comprise a selective epitaxial single crystalline film or a conductive film such as a polysilicon film, a metal film, a metal silicide film, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com