PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • y the diffusion throughout the semiconductor layers of hydrogen from within the silicon nitride film. [0101] An interlayer insulating film 525 is formed by an organic insulating material, such as polyimide and acrylic.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com