PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Many of the more advanced 3D packages will require processes such as sputtering, DRIE, electroplating, and photolithography on very thin wafers.
http://www.w3.org/ns/prov#wasQuotedFrom
  • electroiq.com