About: http://webisa.webdatacommons.org/222992402

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	a substrate including a deep trench having a first depth and a shallow isolation trench having a second depth that is less than the first depth;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com