About: http://webisa.webdatacommons.org/2230856

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	So, air bridges, micromachines, and other structures and techniques shown in co-pending U.S. patent application Ser.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com