About: http://webisa.webdatacommons.org/223180696

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A plasma treating apparatus according to claim 1, wherein the metal oxide is a metal oxide including an element of Group IIIa. 7.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com