About: http://webisa.webdatacommons.org/223203418

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Specifically, a substrate such as a silicon wafer coated with a resist is mounted on a stage, and the above EUV mask is mounted on a catopric exposure apparatus constituted by a combination of reflective mirrors.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com