About: http://webisa.webdatacommons.org/223401978

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring to FIG. 1A, a substrate 1 including a semiconductor material such as silicon (Si) is placed into a deposition chamber (not shown).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com