About: http://webisa.webdatacommons.org/223563870

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Reducing agents and other reactive gases may be used to deposit tantalum-containing materials within the deposition process during step 106.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de