About: http://webisa.webdatacommons.org/223861535

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	wherein the insulating film is a silicon oxide film, wherein the silicon oxide film is formed through a sputtering method using an artificial quartz target. 17.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com