About: http://webisa.webdatacommons.org/223867493

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Excess material formed on a bottom of the pore is removed with a suitable method including but not limited to plasma or wet etch.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com