PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Examples of the material for the passivation and interlevel insulating films are an inorganic insulating film such as an SiO2 or SiNx film, an organic insulating film such as polyimides, a BCB film, an Optomer film, a black resist, or a fluoroplastic, and a stacked structure of these materials.
http://www.w3.org/ns/prov#wasQuotedFrom
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