About: http://webisa.webdatacommons.org/223917260

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The ALD barrier layer may be formed from materials such as Ta, TaN, W, or WN. Examples of ALD processes are described in commonly assigned U.S. patent application Ser.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com