About: http://webisa.webdatacommons.org/224348204

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is a water and developer soluble contrast enhanced photolithographic technique for use in optical microlithography by use of a two layer process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com