About: http://webisa.webdatacommons.org/22442829

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The device isolating layers 201 are made of a material such as a silicon oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com