About: http://webisa.webdatacommons.org/224454823

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The pad layer 12 can be a material such as silicon oxide, silicon nitride or silicon oxy-nitride and be formed by Chemical Vapor Deposition (CVD) or thermal oxidation.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au