About: http://webisa.webdatacommons.org/224631624

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	That dopant may be for example boron introduced in the form of diborane gas (B2 H6).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com