About: http://webisa.webdatacommons.org/224767651

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The surface roughness is particularly evident when depositing layers, and particularly doped layers, over dielectric surfaces such as silicon oxide or silicon nitride.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com