About: http://webisa.webdatacommons.org/224799245

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Where a silicon oxide film is used as the interlayer dielectric film, it is difficult to detect the endpoint of the etching where the etching is a dry etching process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com