About: http://webisa.webdatacommons.org/224819271

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Photolithography techniques were used to create 600 ??m wide areas covered by a mask (which was a photoresist layer) centered at the anticipated location of the mesas.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com