About: http://webisa.webdatacommons.org/224945069

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The processes, such as ALD processes or CVD processes, are assisted by UV radiation.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com