About: http://webisa.webdatacommons.org/225093874

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The unilluminated parts are removed by the etchant used in thewet-etching process at the rate normal to the particular material, etchant composition, temperature and other relevant factors.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com