About: http://webisa.webdatacommons.org/225197918

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This invention relates to semiconductor devices and in particular to the processes used to fabricate them.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com