| http://www.w3.org/ns/prov#value | - The terms ???wafer??? and ???substrate??? are to be understood as including silicon, silicon-on-insulator (SOI), or silicon-on-sapphire (SOS) technology, doped and undoped semiconductors, epitaxial layers of silicon supported by a base semiconductor foundation, and other semiconductor structures, as well as insulating substrates such as glass or quartz.
|
