About: http://webisa.webdatacommons.org/225614253

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This inconsistency is based upon the slurry 150, temperature, the material on the wafer, the amount of pressure, the movement of the wafer carrier 160 and the platen 110, and other factors.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com