About: http://webisa.webdatacommons.org/225899226

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The nitride layers are etched with a gas mixture containing a fluorocarbon such as CF4 and oxygen, while the insulative layers are etched with fluorocarbons alone, for example CHF3 or C4F8.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com