About: http://webisa.webdatacommons.org/225907212

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The process of claim 3, comprising said steps (A), (B) and (C), wherein said volatile metal compound of said step (B) is a metal carbonyl and said nonselectively absorbing layer is a metal.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk