About: http://webisa.webdatacommons.org/225952855

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This mask pattern is projected via a projection lens 8 onto the surface of a substrate 10 to be exposed, such as a printed board or the like, which has been placed on a workpiece carrier 9.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com