About: http://webisa.webdatacommons.org/225975289

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method as defined in claim 1, wherein said etching is a process selected from the group consisting of:
http://www.w3.org/ns/prov#wasQuotedFrom	google.es