About: http://webisa.webdatacommons.org/226013621

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, a material for the posts 105, preferably an inorganic dielectric material such as silicon dioxide, is deposited over exposed surfaces, including surfaces of the sacrificial layer 104.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com