About: http://webisa.webdatacommons.org/226041127

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, a process such as etching may be performed to create patterns replicating the design in a layer of material (such as polysilicon, or oxide, or nitride) which is under the photoresist.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com