About: http://webisa.webdatacommons.org/226076980

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The gate electrode 104 is formed by covering the first substrate 120 with a metal, such as aluminum (Al), aluminum (Al) alloy, or copper (Cu), using a deposition method, such as sputtering.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com