About: http://webisa.webdatacommons.org/22626622

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This invention relates generally to equipment, techniques, and processes for ion beam-slicing of wafers and ingots of semiconductor materials and other materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com