About: http://webisa.webdatacommons.org/226294867

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Silicon dioxide is a suitable material to use for this insulating layer, and PECVD is the preferable deposition method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com