About: http://webisa.webdatacommons.org/226348955

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7 is a plan view showing a state wherein a wafer is transferred from the wafer convey path of FIG. 6 to each unit.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk