About: http://webisa.webdatacommons.org/226537657

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 5 is a plan view partially illustrating the metal film 23 formed on the interlayer insulating film 19 (not shown).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com