About: http://webisa.webdatacommons.org/226547451

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Similar to the previous embodiment, the radiation fins 98 and the light shielding film 99 are made from a metallic material, such as aluminum or tungsten, by the sputtering method or the etching method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com