About: http://webisa.webdatacommons.org/226644773

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 9A is a plan view of the twin coater/developer chamber 350 where the nozzle arm assembly 360 is positioned over the right process chamber 370 to dispense a processing fluid on a substrate ???W??? retained on the spin chuck 1033.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com