About: http://webisa.webdatacommons.org/226826235

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 12 is a capacitor and piezoresistor mask for patterning the p-type layers defining the capacitor middle layer and piezoresistor shown in FIG. 11.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com