About: http://webisa.webdatacommons.org/226940582

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 6A is an enlarged partial cross section of a semiconductor wafer illustrating a planar surface formed in accordance with the method of invention;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com