About: http://webisa.webdatacommons.org/227199254

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	RF source 222 is also referred to as the bias power generator. [0082] The chamber 210 also contains a sidewall 230 and a bottom 213 formed from a conductive material such as aluminum or stainless steel.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr