About: http://webisa.webdatacommons.org/227255436

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As shown in FIG. 3, the third embodiment is an example of adopting the method for cleaning a wafer according to the present invention to cleaning processes after the Chemical Mechanical Polishing (CMP).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au