About: http://webisa.webdatacommons.org/227283815

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As the base film 1001, an insulating film such as silicon oxide, silicon nitride, or silicon nitride oxide may be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com